A User's Guide to Vacuum Technology

Part I Its Basis
1. Vacuum Technology
2. Gas Properties
3. Gas Flow
4. Gas Release from Solids

Part II MEASUREMENT
5. Pressure Gauges
6. Flow Meters
7. Pumping Speed
8. Residual Gas Analyzers
9. Interpretation of RGA Data

Part III PRODUCTION
10. Mechanical Pumps
11. Turbomolecular Pumps
12. Diffusion Pumps
13. Pump Fluids
14, Getter and Ion Pumps
15. Cryogenic Pumps

Jumlah Halaman : 527
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Kode : Pompa 015
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