Minggu, 10 April 2011

MEMS Materials and Processes Handbook

1 The MEMS Design Process
2 Additive Processes for Semiconductors and Dielectric Materials
3 Additive Processes for Metals
4 Additive Processes for Polymeric Materials
5 Additive Processes for Piezoelectric Materials:
Piezoelectric MEMS
6 Materials and Processes in Shape Memory Alloy
7 Dry Etching for Micromachining Application
8 MEMS Wet-Etch Processes and Procedures
9 MEMS Lithography and Micromachining Techniques
10 Doping Processes for MEMS
11 Wafer Bonding
12 MEMS Packaging Materials
13 Surface Treatment and Planarization
14 MEMS Process Integration
Jumlah Halaman : 1224
Kualitas ebook : Good
Kode : MT- 002
Harga : Rp. 30.000